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Gashakar Posted on10:12 pm - Oct 2, 2012

In this type of CVD the pressure in reaction chamber is less than 1 atm (Fig. ).Liao et al. [23] synthesized SWCNTs using decomposition of C 2 H 4 at low pressure (10 mTorr) over Fe particles supported on Si wafers at temperature °C. Ikuno et al. [24] performed selective fabrication of straight CNT bridges between Fe nanoparticles by LPCVD using C 2 H 4 at a low pressure of Pa in.